| 摘要 |
PROBLEM TO BE SOLVED: To realize an electrode constitution of an angular velocity sensor having a vibrator composed of a piezoelectric having signal input/output electrodes wherein unwanted vibrations are reduced to a level negligible in the actual practice. SOLUTION: A vibrator 1 is composed of a piezoelectric block of PZT, etc., formed like a tuning fork having a pair of prism-like arms 4, 5 and a joint 6 coupling the arms 4, 5. On the vibrator 1 are formed driving electrodes 10, 11, detecting pad electrodes 16, 17, etc., for outputting an angular velocity detection signal, and signal input/output electrodes 10-24. The electrodes 10-24 are made from an Ag/Pd conductor having a conductivity as an electrode base material contg. a glass component for ensuring the adhesion to the vibrator 1 and inorg. oxides 1-5 wt.% of the total electrode material. |
