| 摘要 |
PROBLEM TO BE SOLVED: To provide an image fetch apparatus in which illumination without brightness irregularities is obtained in a sufficient quantity of light and in which an image of good quality can be fetched. SOLUTION: The surface of a substrate 11 to be inspected is illuminated linearly with an illumination part 12. A region which is illuminated linearly is imaged by an imaging part 13. In the illumination part 12, a glass rod lens 121 is provided, and a linear reflecting face 122 which is formed along the axial direction on the circumferential face of the glass rod lens 121 is provided. A light source 121a and a light source 121b are irradiated from both end faces of the glass rod lens 121. Light which is scattered on the reflecting face 122 with reference to light advaning at the inside of the glass rod lens 121 while being reflected totally is used as illumination light.
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