PRODUCTION OF COMPOUND METAL OXIDE FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a low-cost compound metal oxide film by which the increase of the rate of film formation, the densification of a film and heat treatment after film formation are made unnecessary. SOLUTION: A pair of electrodes is immersed in a heated aq. soln. of a metal hydroxide in an autoclave. The surface of at least one of the electrodes comprises a metal element B other than the metal element A forming the metal hydroxide. A voltage is then impressed on the electrodes, the polarity of the impressed voltage is inverted at least one time and the objective multiple metal oxide film consisting of the metal elements A and B is formed on the surface of the metal element B.