| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL element having high heat-resistance and weatherability, free from generation of leakage and a dark spot, having high mass-productivity, capable of reducing the cost, and having high luminous efficiency and high brightness. SOLUTION: This organic EL element has a hole injection electrode 2, one kind or more of organic layer 4, an electron injection electrode 6 in order, on a substrate 1. An inorganic hole injection layer 3 is provided between the electrode 2 and the organic layer 4, the layer 3 contains at least one kind selected from the group comprising silicon oxide, silicon nitride, silicon carbide, germanium oxide, germanium nitride and germanium carbide, and a film surface contacting with the organic layer 4 of the hole implantation layer 3 is processed with a plasma.
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