| 摘要 |
PROBLEM TO BE SOLVED: To stabilize the physical properties of electrolytic ionized water by providing the device with an deaerator for removing the gas dissolved in pure water, a chemical mixer for mixing pure water and chemicals and an electrolytic cell for electrolyzing the pure water mixed with the chemicals. SOLUTION: Ultrapure water 11 is deaerated by a deaerator 18 to generate the deaerated ultrapure water 19. A deaeration filter, etc., are used as the deaerator 18. Since the deaeration filter is small, the deaerator 18 is advantageously used in the line. A minute amt. of chemical is then mixed into the deaerated ultrapure water 19 by a chemical mixing device 12, such electrolytes as hydrochloric acid and ammonia are exemplified as the chemical to be mixed in the deaerated ultrapure water 19. The deaerated ultrapure water 19 contg. the chemical is electrolyzed in an electrolytic cell 13 to generate an electrolytic ionized water 17. Consequently, the physical properties of the electrolytic ionized water 17 are stabilized, a stabilized cleaning effect is obtained, and the efficiency of the electrolytic reaction is also improved.
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