发明名称 Flexible seal for a laser system
摘要 A flexible seal permits slidable access to equipment components in an essentially zero clearance environment, without time-consuming disassembly and reassembly. A flexible seal ring includes a thickened radiused boss connected to the outer rim of a flexible flange, connected to a mounting block by an inner hub. The seal ring can be formed as a unitary structure from metal, plastic, elastomer, wood, foam, composite, or combinations thereof. Usually the seal ring has rotational symmetry. Alternatively, the seal ring has an elongated or irregular configuration, e.g. for sealing around a slot. The seal ring can contain an outer o-ring groove. The seal ring is attached to a first plate. A second plate slides laterally to align with the first plate, contacting the flexible seal surface. This presses the seal surface against the second plate, sealing the interface.
申请公布号 AU4337199(A) 申请公布日期 2000.01.24
申请号 AU19990043371 申请日期 1999.06.09
申请人 CYMER, INC. 发明人 PAUL S. THOMPSON
分类号 F16J15/08 主分类号 F16J15/08
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