ILLUMINATOR, ALIGNER AND ILLUMINATING METHOD

摘要

PROBLEM TO BE SOLVED: To keep an illuminating light source in the optimum temperature state. SOLUTION: This illuminator including a light source 1 for emitting light with which photosensitive agent applied on an object is exposed and an air blowing means for blowing air to the light source 1 is provided with a detection means for detecting the temperature state of the light source 1 and a temperature control means for controlling the temperature state of the light source 1 based on the detected result by the detection means.