| 摘要 |
PROBLEM TO BE SOLVED: To obtain an inexpensive and easily manufacturable reflection surface for executing 90 deg. optical path conversion in an optical planar circuit and to simplify the constitution of an optical coupling circuit between the optical elements, having optical axes intersecting orthogonally with each other. SOLUTION: An end face 21c of an optical waveguide 21a is formed by dry etching from a thin film 21 of a quartz material formed on a silicon substrate 20 and the reflection surface 25 of 45 deg. inclination formed by side etching which utilizes the isotropic property of the wet etching is formed on a reflector 23. The reflection surface 25 may be processed by dicing as well. The light beam 24 emitted from the end face 21c is subjected to optical path conversion upward by the reflection surface 25. Easy batch holding of PDs(photodiodes) 22 through solder bumps 30 above the reflection surface 25 is made possible. The reflection surface may be easily coated with a metal or light selective material or the like at a wafer level. |
