| 摘要 |
PROBLEM TO BE SOLVED: To improve the efficiency of vapor deposition by increasing the incident angle of an electronic beam for melting a magnetic material to the magnetic material evaporating source by a magnetic field so as to increase the effective power efficiency and to reduce the distance between the evaporating source and cooling can rolls. SOLUTION: In the case of vapor-deposit-forming a magnetic film by a vapor stream from the magnetic material evaporating source 25 arranged at the center/ lower parts of the two cooling can rolls 21 and 22 for traveling a nonmagnetic substrate, an electronic beam 13 from an electronic gun 12 for evaporating a magnetic material is deflected by the magnetic field of a deflection coil 53 arranged closely to a crucible 8 to enter the source 25. At this time, an incident angleαat a reaching point to the surface of the source 25 of the beam 13 is made at least 40 deg. to suppress the generation of reflected electron to be small to improve effective power efficiency and to prevent the generation of wrinkles caused by the charging of the reflected electron to a film. In addition, the distance Y between the rolls 21, 22 and the source 25 is reduced to improve the efficiency of vapor deposition.
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