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发明名称
WASHING TREATMENT DEVICE
摘要
申请公布号
JPH11290799(A)
申请公布日期
1999.10.26
申请号
JP19980093186
申请日期
1998.04.06
申请人
TOKYO ELECTRON LTD
发明人
TAKASHIMA TOSHIHIDE;TAJIMA TOMOHAYA;KUBOTA HIKARI;TANAKA YUJI;KOGA RYUICHI;NISHIDA NORIHIKO;MORIOKA TAKASHI;TERADA SHOJI
分类号
B08B3/04;H01L21/304;(IPC1-7):B08B3/04
主分类号
B08B3/04
代理机构
代理人
主权项
地址
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