| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate holder capable of positioning and holding a substrate of a different size at a common origin reference position. SOLUTION: An origin reference member 4 having contact pieces 41, 42 is provided at a corner with intersected two adjacent side edges of a rectangular hole 101 of the apparatus body 1, the corner to be an origin reference of a glass substrate 3 is inserted between the contact pieces 41, 42 to determine the origin reference position, rollers 605, 705 at the top ends of leaf springs 603, 703 of holder bodies 602, 702 of substrate holders 6, 7 disposed movably along long grooves 601, 701 of two adjacent edges of the rectangular hole 101 are dropped in click grooves 601a (601b), 701a (701b) to regulate the motion of the holder bodies 602, 702, and the glass substrate 3 is pressed through the rollers 606, 706 at the top ends of the leaf springs 604, 704 and held in two side edge directions of the rectangular hole 102.</p> |
