SUBSTRATE SURFACE TREATING EQUIPMENT,申请号JP19980088027-传众专利搜索

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发明名称	SUBSTRATE SURFACE TREATING EQUIPMENT
摘要
申请公布号	JPH11265869(A)	申请公布日期	1999.09.28
申请号	JP19980088027	申请日期	1998.03.16
申请人	M SETEKKU KK	发明人	SAITO HIROYUKI;TAUCHI HIROSHI
分类号	H01L21/306;H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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