CHEMICAL DISCHARGE NOZZLE,申请号KR19960055322-传众专利搜索

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发明名称	CHEMICAL DISCHARGE NOZZLE
摘要
申请公布号	KR100221700(B1)	申请公布日期	1999.09.15
申请号	KR19960055322	申请日期	1996.11.19
申请人	DAINIPPON SCREEN SEIJO K.K	发明人	YOSHII, HIROSHI
分类号	G03F7/30;B05C5/00;H01L21/02;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/30
代理机构		代理人
主权项
地址

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