发明名称 MIS semiconductor device and method for fabricating the same
摘要 A MIS type semiconductor device and a method for fabricating the same characterized in that impurity regions are selectively formed on a semiconductor substrate or semiconductor thin film and are activated by radiating laser beams or a strong light equivalent thereto from above so that the laser beams or the equivalent strong light are radiated onto the impurity regions and on an boundary between the impurity region and an active region adjoining the impurity region.
申请公布号 US5939731(A) 申请公布日期 1999.08.17
申请号 US19970780714 申请日期 1997.01.08
申请人 YAMAZAKI, SHUNPEI;TAKEMURA, YASUHIKO 发明人 YAMAZAKI, SHUNPEI;TAKEMURA, YASUHIKO
分类号 H01L21/20;H01L21/00;H01L21/336;H01L21/77;H01L21/84;H01L29/08;H01L29/78;H01L29/786;(IPC1-7):H01L29/786;H01L31/039 主分类号 H01L21/20
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