| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the productivity of processed goods by forming a partial ultraviolet light pulse in a slit state and enhancing ablation rate with respect to a material to be processed. SOLUTION: This aligner includes a pulse laser 1 generating an ultraviolet light pulse, integrator lenses 3X and 3Y, and field lenses 5X and 5Y, and is provided with an illumination optical system of processing the ultraviolet light pulse and projecting it to a mask 6, an image formation lens 7 image-forming the ultraviolet light pulse transmitted through the mask 6 and projecting it on a base plate to be processed 8, and moving stages 9a and 9b moving the mask 6 and the base plate 8 in the longitudinal and lateral directions; and the illumination optical system has an ultraviolet light pulse dividing means dividing the incident ultraviolet light pulse into plural slit state partial ultraviolet light pulses having uniform light intensity, desirably a microprism 11.</p> |
