| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a bipolar electrostatic chuck, having a small leakage current at releasing of the voltage, when a body to be sucked is detached. SOLUTION: A pair of electrodes 2a and 2b and an insulating layer 3 provided thereon are provided. A positive voltage is applied on one electrode, and a negative voltage is applied on the other electrode. As a result, in a bipolar electrostatic chuck, which electrostatically sucks the body to be sucked on the insulating layer, the area ratio between the one electrode and the other electrode is made to be in a range of 0.95-1.05.</p> |
