| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a coater which will not cause a defective coating film such that the resist film thickness becomes nonuniform. SOLUTION: A chuck 80 for holding a glass substrate during rotating has a hold face 80a, having suction hoes 81 at four apexes of a square concentric with the hold face 80a to disperse the suction force exerted portion to the four regions on the glass substrate, this permitting the diameter of each suction hole 81 to be reduced and resulting in the suppression of the temp. drop per suction hole 81 due to the effects of the suction force. This avoids partial thickening of the resist film only at the location of the suction hole 81 and avoids forming a defective coating film having a nonuniform thickness.</p> |
