| 摘要 |
PROBLEM TO BE SOLVED: To preventing the remainder of a necessary gas from entering a process chamber in processing steps carried out in another process chamber. SOLUTION: In the method for vacuum processing a work in a plurality of processing steps 45, 46, 47, 45', 46', 47', 45", 46" and 47", a plurality of groups 44, 44' and 44" are provided for carrying out the plurality of processing steps 45, 46, 47, 45', 46', 47', 45", 46" and 47". In each group 44, 44' or 44", the work is transported by a transportation member for each group during intervals between the plurality of processing steps, vacuum atmospheres surrounding the transfer members of the respective groups are separately controlled by valves 48, 48' and 48", whereby the groups 44, 44' an 44" are separately controlled mutually. |
