LIQUID COATING METHOD AND LIQUID COATER,申请号JP19970296941-传众专利搜索

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发明名称	LIQUID COATING METHOD AND LIQUID COATER
摘要
申请公布号	JPH11128815(A)	申请公布日期	1999.05.18
申请号	JP19970296941	申请日期	1997.10.29
申请人	NEC KYUSHU LTD	发明人	UEDA HIROYUKI
分类号	G03F7/16;B05C11/08;B05C11/10;B05D1/40;H01L21/027;(IPC1-7):B05C11/10	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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