发明名称 SHADING FILE AND ITS FORMING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a good-shaped film without discoloring by impurity such as an electrode or dust by baking a layer made of a polyimide resin precursor with a desired shape pattern at a specific range of temperature to form a lightproof film. SOLUTION: By burning a layer made of a polyimide resin precursor with a desired shape pattern at 400-600 deg.C, a lightproof film is formed. Due to this burning, at least a surface layer of the polyimide resin layer is carbonized and becomes black. The polyimide resin precursor for forming a lightproof film means so called polyamic acid which is formed by providing dehydration reaction between aromatic tetracarboxylic acid and aromatic diamine. As the aromatic tetracarboxylic acid, pyromellitic acid, biphenyl tetracarboxylic acid, or benzophenone tetracarboxylic acid is used, and as the aromatic diamine, oxydianiline, paraphenylene diamine, or benzophenone diamine is used.
申请公布号 JPH11126557(A) 申请公布日期 1999.05.11
申请号 JP19970288723 申请日期 1997.10.21
申请人 FUJITSU LTD 发明人 WADA YASUMASA
分类号 H01J9/02;H01J11/12;H01J11/22;H01J11/24;H01J11/26;H01J11/34;H01J11/36;H01J11/42;H01J11/44 主分类号 H01J9/02
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