发明名称 |
Apparatus for producing single crystal |
摘要 |
An apparatus for producing a single crystal by the Czochralski method is disclosed in which an exhaust system is provided with a water sealing bubbler. On the upstream side of the bubbler is provided a buffer or a vacuum breaker or a buffer and a vacuum breaker. The structure prevents the sealing water in the bubbler from flowing backward, so that danger of steam explosion can be avoided.
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申请公布号 |
US5900058(A) |
申请公布日期 |
1999.05.04 |
申请号 |
US19960759224 |
申请日期 |
1996.12.05 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
MIZUISHI, KOUJI;IWASAKI, ATSUSHI |
分类号 |
C30B15/00;C30B29/06;(IPC1-7):C30B35/00 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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