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发明名称
REINIGUNGSGERäT FüR HALBLEITERSCHEIBEN
摘要
申请公布号
DE847311(T1)
申请公布日期
1999.04.22
申请号
DE19970907958T
申请日期
1997.02.28
申请人
SOLID STATE EQUIPMENT CORP., FORT WASHINGTON, PA., US
发明人
ITZKOWITZ, HERMAN, BALA CYNWYD, PA 19004, US
分类号
B08B1/04;B08B3/04;G11B23/50;H01L21/00;H01L21/304;(IPC1-7):B08B3/02;B08B11/02
主分类号
B08B1/04
代理机构
代理人
主权项
地址
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