| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode plate and manufacture thereof which can drill precisely in a short time and at a low cost and by which the surface roughness of the inner wall of a small diameter hole becomes flatter and the generation of a particle and contamination is scarcely occurred. SOLUTION: In the manufacturing method of an electrode plate having lots of small diameter holes for a reaction gas rectifying, when the small diameter hole of the electrode plate is drilled by a diamond drill processing or ultrasonic processing, it is drilled while pouring a grain slurry and the surface roughness Ra of the inner wall of the small diameter hole is finished to the range of 0.01-5 μm. In the electrode plate having lots of small diameter holes for reaction gas rectifying, the surface roughness Ra of the inner wall of the small diameter hole of the electrode plate is the range of 0.01-5 μm. |
