DISK SCANNING APPARATUS FOR BATCH ION IMPLANTERS,申请号KR19940027811U-传众专利搜索

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发明名称	DISK SCANNING APPARATUS FOR BATCH ION IMPLANTERS
摘要
申请公布号	KR0137662(Y1)	申请公布日期	1999.04.01
申请号	KR19940027811U	申请日期	1994.10.25
申请人	LG IND. SYSTEMS CO.,LTD	发明人
分类号	H03K3/00;(IPC1-7):H03K3/00	主分类号	H03K3/00
代理机构		代理人
主权项
地址

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