| 摘要 |
<p>PROBLEM TO BE SOLVED: To effectively remove fluctuations between multiple samples and to analyze many samples in a unit time by providing a mechanism for measuring the azimuth of an analysis face, a mechanism for adjusting the azimuth, and a mechanism for adjusting the distance between the analysis face and a secondary ion extraction electrode. SOLUTION: Commercially available an analysis face azimuth fine adjusting mechanism and a distance fine adjusting mechanism between an analysis face and a secondary ion extracting electrode are added to a secondary ion mass spectrometer, using a sector magnetic-field type mass spectrometer. An analysis face is irradiated with a He-Ne laser beam from an analysis face illumination light guide path, the reflected light is extracted from an analysis face observing optical microscope optical path, the change of the reflected light spot position is read, and an azimuth is adjusted so as to make the spot position constant. An oxygen molecule primary ion beam accelerated to a prescribed voltage is irradiated to the analysis face, and the distance between the analysis face and the secondary ion extraction electrode is adjusted so as to make the component in the plane, including the primary and secondary optical axes at the beam spot center position, constant.</p> |
