| 摘要 |
<p>PROBLEM TO BE SOLVED: To increase utilization efficiency of a laser beam and to enlarge tolerance against misalignment by providing a laser generator with an unstable type resonator, and thereby making a beam spot diameter smaller for a laser beam with which a mask is irradiated. SOLUTION: A laser beam from a laser generator 1 is split into laser beams that advance in a number of arbitrary directions, with each laser beam converged by a condensing lens 3 and emitted onto a pattern mask 4. The laser beam, which penetrates the transfer pattern of the pattern mask 4 and which is shaped into a machining configuration, is image-formed as a transferred image on a machining target 6 through a transfer lens 5, providing required machining. In making the beam spot diameter smaller on the pattern mask 4, the divergence angle of the laser beam needs to be smaller; for this purpose, an unstable type resonator is used for the laser generator 1.</p> |
