| 摘要 |
In order to provide an analysis electron microscope which is capable of effectively performing elementary analysis of plural analysis points of a sample, an electron beam 2 discharged from an electronic source 1 irradiates the sample through a condenser lens aperture 3. The electron beam 2 transmitted through the sample 12 is magnified by an objective lens and a plural focussing lens 18 and forms an electron microscope image of the sample 12 on a fluorescent plate 13. A characteristic X-ray emitted from the sample 12 is detected by the elementary analysis device having the elementary analysis detecting element 16 and an elementary analysis control equipment 17 and is analyzed. The position of the analysis points 1 and 2 of the sample and the spot size of the irradiation electron beam is stored in an electron microscope control equipment 14 beforehand, and when the analysis starts, the stored position and size information begin to be read, the analysis points 1 and 2 and the electron beam size are set automatically based on the information, and the elementary analysis of the analysis points 1 and 2 is thereby performed automatically. |
