| 摘要 |
PROBLEM TO BE SOLVED: To enhance precision and stability by using a multiple ion collector in a small-sized ionization vacuum gauge. SOLUTION: An electronic source is disposed outside an anode volume of a releasing anode 14, and a plurality of ion collector electrodes 18, 18' are disposed in the anode volume, and a plurality of anode props 16, 16' extending to an axial direction for supporting the releasing anode are electrically connected to the releasing anode 14. In order to strongly repel electrons from the anode props 16, 16', the plurality of ion collector electrodes 18, 18' are disposed so as to sufficiently approach the plurality of anode props 16, 16' extending in an axial direction, respectively. |
