LOW PRESSURE CVD APPARATUS,申请号JP19970163639-传众专利搜索

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发明名称	LOW PRESSURE CVD APPARATUS
摘要
申请公布号	JPH1116837(A)	申请公布日期	1999.01.22
申请号	JP19970163639	申请日期	1997.06.20
申请人	SONY CORP	发明人	FUJITA SHIGERU
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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