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发明名称
DEVICE AND METHOD FOR TREATING SAMPLE
摘要
申请公布号
JPH1116850(A)
申请公布日期
1999.01.22
申请号
JP19970180280
申请日期
1997.06.23
申请人
NEC CORP
发明人
TANABE HIROSHI
分类号
H01L21/20;H01L21/268;H01L21/336;H01L29/786;H01S3/10;(IPC1-7):H01L21/268
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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