PRODUCTION OF SEMICONDUCTOR DEVICE,申请号JP19970164178-传众专利搜索

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发明名称	PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH1116861(A)	申请公布日期	1999.01.22
申请号	JP19970164178	申请日期	1997.06.20
申请人	TOSHIBA CORP	发明人	SANO TAKASHI
分类号	H01L21/18;H01L21/02;H01L21/304;H01L27/00;H01L27/12;(IPC1-7):H01L21/304	主分类号	H01L21/18
代理机构		代理人
主权项
地址

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