| 摘要 |
There is provided a solid-state image sensor including a photodetector array in which a plurality of photodetectors are one- or two-dimensionally arranged, each one of the photodetctors including electrodes in a photoelectric conversion region, and transmitting signals when detecting a light passing through the electrode (5), the solid-state image sensor converting the signals into time sequence electric signals, characterized by that the electrode (5) is composed of titanium dioxide (TiO2). The titanium dioxide preferably contains oxygen vacancies or at least one of tungsten (W), phosphorus (P), antimony (Sb), tantalum (Ta), niobium (Nb), indium (In) and oxides thereof (WO3, P2O5, Sb2O5, Ta2O5, Nb2O5, In2O3). The above-mentioned solid-state image sensor provides a high quantum efficiency which would be obtained when transparent, electrically conductive material such as ITO (In2O3-SnO2) and tin oxide (SnO2) is used. <IMAGE> |
