Integrated inkjet print head and manufacturing process thereof

摘要

The inkjet print head comprises an ink drop emission mini-gun (30) and a drop emission sensor (4) integrated in a chip of semiconductor material. The mini-gun is formed by an ink chamber (21) and a nozzle (23) in communication with the ink chamber and the drop emission sensor includes a resistive element (4) arranged in a position adjacent to the ink chamber (21). The resistance of the resistive element (4) depends on the pressure exerted thereon, so that when the mini-gun emits an ink drop, it is subjected to a recoil movement which causes a change of pressure and hence of resistance in the resistive element; this change in resistance may be detected through a suitable circuitry (29) to identify whether and when a drop of ink has been emitted.