Sol-gel route to transparent metal oxide films

摘要

This invention relates to metal oxides based films and a method for their production via a sol-gel route using metal bis( beta -diketonate) salts as precursors. They can be conveniently doped by Group (III), (IV) or (V) impurities and may be used to provide conductive coating on optically transparent substrates such as glass, ceramics or polymers.