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发明名称
Reaktor zur Verarbeitung von Wafern mit einer Schutzvorrichtung
摘要
申请公布号
DE19725527(A1)
申请公布日期
1998.12.24
申请号
DE1997125527
申请日期
1997.06.17
申请人
PHILIPS PATENTVERWALTUNG GMBH, 22335 HAMBURG, DE
发明人
VOLLE, WOLFGANG, 71088 HOLZGERLINGEN, DE
分类号
B65G49/07;G05D3/12;H01L21/00;H01L21/677;(IPC1-7):H01L21/68;H01J37/32
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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