发明名称 Direct assembly for silicon sensors
摘要 The assembly requires wafers or chips location with respect to other silicon chips. The latter are fitted onto or into chip supports, between which and the silicon chips are made and/or placed wire bond couplings. The chips of other material are coated with an adhesive film and setting the other material chips onto the location region of the Si chips by pick and place technology. Then follows a rough and fine positioning of the chips and the adhesive fixing process is initiated. Then follows a measured lobe or all round casting for preserving, fixing, or hermetic enclosure of the bond coupling.
申请公布号 DE19816309(A1) 申请公布日期 1998.12.24
申请号 DE1998116309 申请日期 1998.04.11
申请人 CIS INSTITUT FUER MIKROSENSORIK E.V., 99097 ERFURT, DE 发明人 DUERSCHMIDT, MANFRED, DR., 98544 ZELLA-MEHLIS, DE;WALLERER, HORST, 99091 ERFURT, DE
分类号 H01L27/144;H01L31/0203;(IPC1-7):H01L21/58;H01L21/60;H01L31/023 主分类号 H01L27/144
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