| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer contact preventive device capable of simplifying troublesome works in manually taking out a wafer, and reducing the man-hour. SOLUTION: A wafer contact preventive device is a device to be mounted on a wafer storage cassette having a wafer arrangement groove to prevent the contact with wafers W, and comprises a rectangular support frame 2, ribs 4 which are inwardly divided in a comb manner are provided opposite to a pair of walls 3, slits 5 between the ribs have the same pitch as the groove pitch of the wafer arrangement groove, and the width D of the slits 5 is smaller than the groove width of the water arrangement groove.</p> |
