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发明名称
METHOD AND APPARATUS FOR POLISHING
摘要
申请公布号
JPH10256212(A)
申请公布日期
1998.09.25
申请号
JP19970062861
申请日期
1997.03.17
申请人
TOSHIBA CORP
发明人
MURAI SEIICHIRO
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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