发明名称 TUNNEL TYPE SUPERCONDUCTING JUNCTION ELEMENT AND SUPERCONDUCTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an element using a superconducing oxide material which can operate at a high temperature and having a superconducting tunnel junction characteristic by providing upper and lower superconducting elements composed mainly of a composite oxide and a barrier layer composed mainly of a specific composite oxide. SOLUTION: A block having an area of 3μm by 3μm is formed by cutting a laminated film formed on a substrate 10 by argon ion etching and a joint holding a barrier layer 13 composed mainly of a composite oxide expressed by Bi2 Am+1 Cum O2m+4 (where, A and m respectively represent one kind of alkaline earth metal and an integer of 1<=m<=4) is formed between lower and upper superconducting electrodes 11 and 12. Then a superconducting junction element is constituted by separating the electrodes 12 and 11 from each other by forming a interlayer insulating layer 14 that is a deposit of CaF2 and leading out metallic electrodes 15 from the insulating layers 14. Therefore, an element using a superconducting oxide material which can operate at a high temperature and having a high superconducting tunnel junction characteristic can be obtained.
申请公布号 JPH10233536(A) 申请公布日期 1998.09.02
申请号 JP19970182799 申请日期 1997.07.08
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 ADACHI HIDEAKI;SAKAI MASAHIRO;ODAKAWA AKIHIRO;SETSUNE KENTARO
分类号 H01L39/22;B82B1/00;H01L39/24;(IPC1-7):H01L39/22 主分类号 H01L39/22
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