SEMICONDUCTOR OPTICAL DEVICE HAVING DEVICE REGIONS AND DIFFRACTION GRATINGS

摘要

A semiconductor optical device including multilayer semiconductor device regions formed on a surface of a semiconductor substrate and act as an optical device respectively, and diffraction gratings formed on a back of the substrate optically coupled with at least one of said regions through the substrate. The region has a function such as light emitting, light receiving, light amplification or light switching. The regions and gratings can be respectively formed on the surface and the back, monolithicly, and polishing of the substrate provides a suitable thickness so that the regions and the gratings may be optically coupled with each other. The regions and gratings may be arranged at the optimum positions in the direction parallel to the substrate. Extremely precise alignment of its components and many channels can be obtained with compact size easily.