发明名称 DAM BAR MACHINING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide a dam bar machining apparatus which is adaptable to machining points arranged with equal or not equal spacings and capable of machining at desired machining points of a work at a high speed, without needing to manually correct a laser working programs by an operator even if the laser beam irradiation position varies. SOLUTION: Prior to an actual dam bar machining, one shot of laser beam is applied to preform a work while the image of this laser beam track is captured by a camera 29 to obtain a correct value, using an image processor 27 and the laser beam irradiating position in the Y-axis direction is corrected by an X-Y table, based on the correct value to correct the delay time to be given to a delay circuit, using a correction (time) data.</p>
申请公布号 JPH10200028(A) 申请公布日期 1998.07.31
申请号 JP19970002602 申请日期 1997.01.10
申请人 HITACHI CONSTR MACH CO LTD 发明人 MINOMOTO YASUSHI;MITSUYANAGI NAOKI;SHIRAI TAKASHI;SHIMOMURA YOSHIAKI;OKUMURA SHINYA;SAKURAI SHIGEYUKI;NISHIGAKI TAKESHI
分类号 B23K26/02;H01L23/50;(IPC1-7):H01L23/50 主分类号 B23K26/02
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