Method for producing composite sintered body of silicon carbide and silicon nitride

摘要

A composite sintered body of silicon carbide and silicon nitride having a nano-composite structure in which fine SiC particles are dispersed in Si3N4 particles and grain boundaries and fine Si3N4 particles are dispersed in SiC particles is produced by (a) adding at least one sintering aid, boron and carbon to a mixed powder of silicon carbide and silicon nitride to form a green body, the sintering aid being (i) Al2O3 or AlN and/or (ii) at least one oxide of an element selected from Groups 3A and 4A of the Periodic Table, and (b) sintering the green body by HIP or by a high-temperature normal sintering method.