发明名称 Electronic coating materials using mixed polymers
摘要 The present invention relates to a method of forming coatings on electronic substrates and the substrates coated thereby. The method comprises applying a coating comprising hydrogen silsesquioxane resin and a polysilazane on a substrate and heating the coated substrate at a temperature sufficient to convert the resins to ceramics.
申请公布号 US5776599(A) 申请公布日期 1998.07.07
申请号 US19960773465 申请日期 1996.12.23
申请人 DOW CORNING CORPORATION 发明人 HALUSKA, LOREN ANDREW;MICHAEL, KEITH WINTON
分类号 C04B41/50;C04B41/87;H01L21/312;H01L21/316;H01L23/29;(IPC1-7):B32B9/04 主分类号 C04B41/50
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