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发明名称
CLEANING METHOD FOR FILM DEPOSITION SYSTEM AND METHOD FOR FILM DEPOSITION
摘要
申请公布号
JPH10168574(A)
申请公布日期
1998.06.23
申请号
JP19960351988
申请日期
1996.12.11
申请人
CANON INC
发明人
AOIKE TATSUYUKI
分类号
G03G5/08;C23C16/44;C23C16/50;H01L21/205;(IPC1-7):C23C16/50
主分类号
G03G5/08
代理机构
代理人
主权项
地址
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