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经营范围
发明名称
PROBE DEVICE
摘要
申请公布号
KR0138752(B1)
申请公布日期
1998.06.15
申请号
KR19910015124
申请日期
1991.08.30
申请人
TOKYO ELECTRON KK.
发明人
IKEDA, TOORU;IWATA, TERUO;IMAHASHI, ITSEI
分类号
G01R1/073;(IPC1-7):G01R1/067
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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