| 摘要 |
PROBLEM TO BE SOLVED: To obtain a horizontal conveyance test handler whose reliability and operability are enhanced by mounting an image input means on a device conveyance mechanism, and automating a positioning operation on the basis of its image data. SOLUTION: Image data is fetched by a CCD camera 14 which is attached to a device conveyance mechanism 13 which is moved to the X-direction and the Y-direction, and the position of the central point of the square image of an IC socket 40 is found while a reference point is set in a point O. The size of a tray 43 is collected, the existence of a device 10 housed n the tray 43 is detected, the type of the housed device 10 is judged, or the central position of the device 10 is computed by using the image data, and the X-position and the Y-position are corrected and moved by the device conveyance mechanism 13. Then, a suction arm is moved to the Z-direction, the device 10 is vacuum-sucked by a suction pad so as to be lifted, the device is moved to the X-direction and the Y-direction so as to be conveyed to the position of the IC socket 40, and the device is tested by an IC tester. In this manner, it is possible to obtain a horizontal conveyance test hander in which a positioning operation and a data setting operation are automated by the image data from the CCD camera 14 and whose reliability and operability can be enhanced. |
