发明名称 ULTRAVIOLET-RAY IRRADIATION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an ultraviolet-ray irradiation device which can be operated easily and can easily perform precise illuminance adjustment. SOLUTION: A discharge lamp 1a is positioned so that the maximum luminance part can come to the position of the first focal point of an elliptic light condensing mirror 1b. The second focal point of the mirror 1b is positioned to the light emitting section 2' of a lamp house and the light from the lamp 1a is condensed to the second focal point. The section 2' is provided with an illuminance adjusting mechanism 20 which moves the incident end 3a of a light guiding fiber 3 in the direction of the optical axis and the illuminance can be adjusted by adjusting the distance between the incident end 3a of the fiber 3 and the second focal point. Since the illuminance is adjusted by moving the incident end 3a of the fiber 3, the illuminance variation becomes slower at the time of adjusting the illuminance and the illuminance is monotonously reduced when the incident end 3a is moved farther from the second focal point. Therefore, the illuminance can be adjusted precisely.
申请公布号 JPH1097973(A) 申请公布日期 1998.04.14
申请号 JP19960251399 申请日期 1996.09.24
申请人 USHIO INC 发明人 MINOBE TAKESHI
分类号 G03F7/20;H01L21/027;H01L21/26;(IPC1-7):H01L21/027 主分类号 G03F7/20
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