发明名称 HEAT TREATMENT APPARATUS FOR LARGE-SIZED THIN GLASS SUBSTRATE
摘要 <p>PROBLEM TO BE SOLVED: To provide a discrete units method for glass-substrate heat treatment that can uniformly heat-treat a film-coated surface of a glass substrate which may be coated with different films and may have different structures through a variety of processes, and also provide an apparatus for the discrete units method. SOLUTION: This hot-plate type heat treatment apparatus for largesized thin glass substrate comprises placing a glass substrate one surface of which is coated with a substance to be heat-treated on a hot plate fitted with spacers for providing a clearance between the glass plate and the hot plate in such a-size that covers the whole area of the glass substrate, and heating the surface of the glass substrate placed on the hot plate uniformly to a high temperature in such a way that when the glass substrate is placed with its coated surface upward on the hot plate, the clearance between the hot plate surface and the surface of the glass substrate reverse to the coated surface can be made uniform over the whole area of the glass substrate.</p>
申请公布号 JPH1081547(A) 申请公布日期 1998.03.31
申请号 JP19960235209 申请日期 1996.09.05
申请人 CANON INC 发明人 YAMAGUCHI TAKEHITO
分类号 G02B5/20;C03C21/00;C03C23/00;(IPC1-7):C03C21/00 主分类号 G02B5/20
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