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发明名称	SEMICONDUCTOR DEVICE AND FABRICATION THEREOF
摘要
申请公布号	JPH1050999(A)	申请公布日期	1998.02.20
申请号	JP19960200830	申请日期	1996.07.30
申请人	MATSUSHITA ELECTRIC WORKS LTD	发明人	SHIRAI YOSHIFUMI;SUZUMURA MASAHIKO;HAYAZAKI YOSHIKI;SUZUKI YUJI;KISHIDA TAKASHI;TAKANO MASAMICHI;YOSHIDA TAKESHI
分类号	H01L23/52;H01L21/3205;H01L29/786;(IPC1-7):H01L29/786;H01L21/320	主分类号	H01L23/52
代理机构		代理人
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