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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要
申请公布号
JPH1027883(A)
申请公布日期
1998.01.27
申请号
JP19960183080
申请日期
1996.07.12
申请人
HITACHI LTD;HITACHI DEVICE ENG CO LTD
发明人
SHIMAMOTO HIROMI;TANABE MASAMICHI;OUE EIJI;KONDO MASAO;ONOUCHI YUKIHIRO;WASHIO KATSUYOSHI
分类号
H01L21/28;H01L21/768;H01L21/822;H01L27/04;(IPC1-7):H01L27/04
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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